Method for determining the focal position of at least two...

Details Method for determining the focal position of at least two... Method for determining the focal position of at least two...

2008-03-01

2009-06-23

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Position or displacement

C356S624000

Reexamination Certificate

active

07551296

ABSTRACT:
A method for determining the focal position of at least two edges of structures (31) on a substrate (30) is disclosed. During the movement of a measurement objective (21) in the Z-coordinate direction, a plurality of images of the at least one structure (31) is acquired with at least one measurement window (45) of a detector. An intensity profile of the structure (31) is determined for each image.

REFERENCES:
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patent: 6865288 (2005-03-01), Shishido et al.
patent: 6924900 (2005-08-01), Rinn
patent: 2002/0196331 (2002-12-01), Rinn
patent: 2004/0008877 (2004-01-01), Leppard et al.
patent: 2007/0069106 (2007-03-01), Krief et al.
patent: 2007/0070336 (2007-03-01), Maeda et al.

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