Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2004-04-27
2009-02-10
Luu, Thanh X (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C359S383000, C250S201700
Reexamination Certificate
active
07488924
ABSTRACT:
The invention refers to a process for determining the focus position when imaging a specimen (4) with a field stop imaged onto the specimen detecting this image using a position-sensitive receiving-device inclined relative to the field stop defining the focus position by means of intensity distribution in the receiving device. The invention also refers to set-ups as regards implementation of the process according to the invention.According to the invention, in a process of the above-mentioned type, imaging of the field stop onto the specimen (4) is at least partially superposed by an optical lattice; the position-sensitive receiving device is used to determine intensity values for the light reflected by the specimen; these intensity values are assigned to positions in the receiving device; position-related contrast values are determined from the position-related intensity values; the position of the contrast focus in the receiving device as equivalent of the current focus position is determined using these contrast values.
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Bublitz Daniel
Graefe Dieter
Westphal Peter
Carl Zeiss MicroImaging GmbH
Legasse Jr. Francis M
Luu Thanh X
Patterson Thuente Skaar & Christensen P.A.
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