Method for determining the centrality of masks

Details Method for determining the centrality of masks Method for determining the centrality of masks

2011-07-26

2011-07-26

Chowdhury, Tari (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

C356S401000, C356S614000, C356S620000, C382S151000

Reexamination Certificate

active

07986409

ABSTRACT:
A method for determining the centrality of masks is disclosed. The mask is positioned in a coordinate measuring device on a measurement table displaceable in a direction perpendicular to the optical axis of an imaging measurement system in an interferometrically measurable way. The position of a mask coordinate system with respect to the measuring device coordinate system is determined based on at lest two structures on the mask. The relative distance from one of the at least first and second outer edges to the at least two structures is determined. The coordinate measuring machine determines the actual coordinates of the at least two structures with respect to the respective outer edges, which must not exceed a predetermined deviation from a desired value.

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