Method for determining temperatures on semiconductor components

Details Method for determining temperatures on semiconductor components Method for determining temperatures on semiconductor components

2005-10-11

2005-10-11

Verbitsky, Gail (Department: 2859)

Thermal measuring and testing

Temperature measurement

Nonelectrical, nonmagnetic, or nonmechanical temperature...

C374S121000

Reexamination Certificate

active

06953281

ABSTRACT:
A method and a device for determining temperatures on semiconductor components are provided. In order to determine a temperature on a semiconductor component, a scanning light wave is irradiated onto a measuring point on the semiconductor component. Next, a response light wave reflected from the measuring point is recorded. Then, the temperature of the measuring point is ascertained with the aid of a temperature-dependent property R of the response light wave.

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