Method for determining surface contour of piezoelectric wafers

Details Method for determining surface contour of piezoelectric wafers Method for determining surface contour of piezoelectric wafers

1982-05-27

1984-05-01

Tokar, Michael J.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Semiconductors for nonelectrical property

324 711, G01N 2700

Patent

active

044464320

ABSTRACT:
A method utilizing a localized electrical field to precisely determine the surface contour of a substantially flat wafer of piezoelectric material having a slight convexity in its opposing faces.

REFERENCES:
patent: 4103226 (1978-07-01), Fromson
patent: 4112355 (1978-09-01), Gibson
patent: 4168465 (1979-09-01), Prince
patent: 4182981 (1980-01-01), Shum
patent: 4311959 (1982-01-01), Riessland
T. Shiosaki et al., "Application of Surface Wave to the Study of Semiconductor Surface State Using the Separated-Medium Acoustoelectric Effect," Applied Physics Letters, vol. 26, No. 7, pp. 360-362, Apr. 1, 1974.

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