Method for determining standard cycle time of a stage dynamicall

Details Method for determining standard cycle time of a stage dynamicall Method for determining standard cycle time of a stage dynamicall

1997-03-11

1998-10-20

Ruggiero, Joseph

Boots, shoes, and leggings

36446828, G06F 1900

Patent

active

058256504

ABSTRACT:
A method is disclosed for generating a model for predicting standard cycle time for a semiconductor process stage. A generic cycle time model is created based on Little's formula and Kingman's equation. Past cycle times as related to equipment utilization is used to generate a regression curve. The regression curve is then used to determine the coefficients of the generic cycle time model. Then, the standard cycle time of a stage for a future upcoming cycle is determined by using the cycle time model.

REFERENCES:
patent: 5305221 (1994-04-01), Atherton
patent: 5586021 (1996-12-01), Fargher et al.

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