Method for determining solvent permeability of films

Measuring and testing – With fluid pressure – Porosity or permeability

Reexamination Certificate

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C427S008000

Reexamination Certificate

active

07458251

ABSTRACT:
A method is disclosed to measure the permeability of films or coatings towards solvents (e.g. water). First a substrate comprising an absorption or container layer is provided, preferably the material is a porous material. To study water permeability, the porous material is hydrophilic or is made hydrophilic by means of e.g. an anneal process. To study the permeability of the film or coating, the coating is deposited on top of the porous material. The substrate comprising the film or coating on top of the absorption or container layer is then brought into a pressurizable chamber subsequently filled with the gaseous substance of the solvent (e.g. water vapor). By increasing/decreasing the vapor pressure in the chamber between zero and the equilibrium vapor pressure of the solvent used, the permeability (penetration) of solvent through the film or coating can be determined. The amount of solvent that can penetrate through the film or coating can be measured by means of ellipsometry, mass spectrometry, etc. The method of preferred embodiments of the invention can be applied to predict the water permeability of photosensitive coatings used in photolithography in semiconductor processing, which is especially important in case of immersion lithography.

REFERENCES:
patent: 6319736 (2001-11-01), Baklanov et al.
patent: 6435008 (2002-08-01), Baklanov et al.
patent: 2001/0054306 (2001-12-01), Baklanov et al.
patent: 2002/0022378 (2002-02-01), Baklanov et al.
patent: 2003/0074954 (2003-04-01), Engle et al.
patent: 2005/0092068 (2005-05-01), Ascheman et al.
Silver, Richard M., Editor, “Metrology, Inspection, and Process Control for Microlithography XIX”, Proceedings of the SPIE, vol. 5753, pp. 508-518 (2005).

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