Method for determining silicon (mass 28) beam purity prior to im

Details Method for determining silicon (mass 28) beam purity prior to im Method for determining silicon (mass 28) beam purity prior to im

1987-08-06

1989-01-24

Tokar, Michael J.

Measuring and testing

Testing of apparatus

2504922, 437 20, G21K 500

Patent

active

047993928

ABSTRACT:
A method for determining silicon mass 28 beam purity prior to implanting gallium arsenide by implanting silicon in a silicon monitor wafer and analyzing the damage created by the implantation.

REFERENCES:
patent: 4550031 (1985-10-01), Abrokwah
patent: 4615766 (1986-10-01), Jackson et al.
patent: 4717829 (1988-01-01), Turner

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