Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-06-14
2011-06-14
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S052000, C355S053000, C355S067000, C355S077000
Reexamination Certificate
active
07961297
ABSTRACT:
A method for determining intensity distribution in the focal plane of a projection exposure arrangement, in which a large aperture imaging system is emulated and a light from a sample is represented on a local resolution detector by an emulation imaging system. A device for carrying out the method and emulated devices are also described. The invention makes it possible to improve a reproduction quality since the system apodisation is taken into consideration. The inventive method includes determining the integrated amplitude distribution in an output pupil, combining the integrated amplitude distribution with a predetermined apodization correction and calculating a corrected apodization image according to the modified amplitude distribution.
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Boehme Beate
Dittmann Olaf
Geh Bernd
Greif-Wuestenbecker Joern
Gruner Toralf
Carl Zeiss SMS GmbH
Kim Peter B
Patterson Thuente Christensen Pedersen , P.A.
Riddle Christina
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