Method for determining exposure condition and...

Photocopying – Projection printing and copying cameras – Methods

Reexamination Certificate

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C355S056000, C355S053000

Reexamination Certificate

active

08085386

ABSTRACT:
A method for determining an exposure condition for use in projecting an image of a pattern of an original on a substrate includes a setting step of setting an exposure condition, an image calculating step of calculating a dimension of an image to be projected on the substrate under the set exposure condition, an electrical characteristic calculating step of calculating an electrical characteristic of at least one of a portion for use as an interconnection and a portion for use as a transistor in a pattern to be formed on the substrate in accordance with a result calculated in the image calculating step, a determining step of determining whether the electrical characteristic calculated in the electrical characteristic calculating step satisfies a requirement, and an adjusting step of adjusting the set exposure condition when the electrical characteristic is determined not to satisfy the requirement in the determining step.

REFERENCES:
patent: 5465220 (1995-11-01), Haruki et al.
patent: 6219630 (2001-04-01), Yonezawa et al.
patent: 6562638 (2003-05-01), Balasinski et al.
patent: 6928636 (2005-08-01), Ohnuma
patent: 6944844 (2005-09-01), Liu
patent: 7386830 (2008-06-01), Fukuhara
patent: 7393616 (2008-07-01), Huang et al.
patent: 7403649 (2008-07-01), Cai et al.
patent: 7459243 (2008-12-01), Sasaki
patent: 7642022 (2010-01-01), Yoshii et al.
patent: 2007/0035716 (2007-02-01), Yoshii et al.
patent: 2007/0168898 (2007-07-01), Gupta et al.
patent: 2009/0180097 (2009-07-01), Yoshii et al.
patent: 1500974 (2005-01-01), None
patent: 6-120119 (1994-04-01), None
patent: 2005-026701 (2005-01-01), None
patent: 2005-258080 (2005-09-01), None

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