Image analysis – Applications – Range or distance measuring
Reexamination Certificate
2007-01-31
2011-12-27
Wu, Jingge (Department: 2624)
Image analysis
Applications
Range or distance measuring
C382S100000, C117S015000
Reexamination Certificate
active
08085985
ABSTRACT:
The present invention is a method for determining a relative distance between a reference member placed above a melt surface and the melt surface upon pulling a silicon single crystal out of a raw material melt in a crucible by a CZ method characterized by at least: pulling the silicon single crystal applying a magnetic field; taking a picture of a real image of the reference member and a mirror image of the reference member reflected on the melt surface with a detector; processing the picture taken of the real image and the mirror image of the reference member as different pictures by separating the picture taken; and calculating the relative distance between the real image and the mirror image of the reference member from the processed pictures to determine the relative distance between the reference member and the melt surface.
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Fusegawa Izumi
Urano Masahiko
Oliff & Berridg,e PLC
Shin-Etsu Handotai & Co., Ltd.
Wu Jingge
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