Method for determining COP generation factors for...

Details Method for determining COP generation factors for... Method for determining COP generation factors for...

2007-05-22

2011-11-22

Williams, Hezron E (Department: 2856)

Measuring and testing

Testing of material

Reexamination Certificate

active

08061225

ABSTRACT:
A whole determination area of a targeted wafer is concentrically divided in a radial direction, COP density is obtained in each divided determination segment, a maximum value of the COP density is set as COP densityRADIUSMAX, a minimum value of the COP density is set as COP densityRADIUSMIN, a value computed by “(COP densityRADIUSMAX−COP densityRADIUSMIN)/COP densityRADIUSMAX” is compared to a predetermined set value, and a non-crystal-induced COP and a crystal-induced COP are distinguished from each other based on a clear criterion, thereby determining the COP generation factor. Therefore, a rejected wafer in which a determination of the crystal-induced COP is made despite being the non-crystal-induced COP can be relieved, so that a wafer production yield can be enhanced.

REFERENCES:
patent: 5980720 (1999-11-01), Park et al.
patent: 6392434 (2002-05-01), Chiu
patent: 6509965 (2003-01-01), Fossey
patent: 2006/0009942 (2006-01-01), Keck et al.
patent: 100 48 432 (2001-05-01), None
patent: 101 43 231 (2002-03-01), None
patent: 101 43 761 (2002-03-01), None
patent: 10-227729 (1998-08-01), None
patent: 2001-081000 (2001-03-01), None
patent: 2002-083853 (2002-03-01), None
patent: 2002-145698 (2002-05-01), None
patent: 2004-193529 (2004-07-01), None
patent: 2005-257576 (2005-09-01), None
patent: 2006-040961 (2006-02-01), None
patent: 02/01626 (2002-01-01), None
H. Naruoka et al., “Cu Decoration/SEM ni yoru Kyomen Kenma Kotei Kiin no Sankamaku Taiatsu Furyobu no Kansatsu”, Dai 58 Kai Extended abstracts; the Japan Society of Applied Physics, Oct. 1997, p. 242, [2p-N-2].
Surfscan SP2 brochure, Copyright 2004 KLA-Tencor Corporation.

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