Method for determining absolute reflectance of a material in the

Details Method for determining absolute reflectance of a material in the Method for determining absolute reflectance of a material in the

1993-08-23

1994-11-08

Dzierzynski, Paul M.

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

356445, 356448, G01J 142

Patent

active

RE0347833

ABSTRACT:
A method for determining a value of absolute reflectance of a material at [a predetermined] any wavelength, in the ultraviolet range from its measured reflectance which includes system losses contributed by optics, illumination sources, detectors, etc. The method involves the measurement of reflectance from a known material such as single crystal silicon whose absolute reflectance is well known, dividing the measured value by the absolute value to obtain a system efficiency coefficient at the known wavelength and then, without changing the illumination or optics, measuring the reflectance of the unknown material and applying this coefficient to this measured value to obtain its absolute value.

REFERENCES:
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patent: 4575252 (1986-03-01), Akiyama
patent: 4899055 (1990-02-01), Adams
patent: 5101111 (1992-03-01), Kondo
patent: 5120966 (1992-06-01), Kondo
Barkley, John R., "Measurement and Analysis of Reference Spectra of SiP.sub.2," Applied Optics vol. No. 9, (Sep. 1972) pp. 1928-1935.
Book by Dr. Horst Piller, Microscope Photometry, published by Springer-Verlag Berlin Heidalberg (1977), Chapter 9.

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