Electricity: measuring and testing – Using ionization effects – For analysis of gas – vapor – or particles of matter
Patent
1995-09-15
1998-01-06
Brown, Glenn W.
Electricity: measuring and testing
Using ionization effects
For analysis of gas, vapor, or particles of matter
73 3004, 31511121, 436153, G01N 2770, H05H 146
Patent
active
057059314
ABSTRACT:
In accordance with the method of the present invention, the radio frequency discharge current generated in a plasma reactor is measured in the form of analog signals at a portion of the reactor acting as an earth electrode. The analog signals are converted into digital signals, and plasma parameters are evaluated from the digital signals by means of a mathematical algorithm.
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Adolph Slaby Instituut Forschungsgesellschaft fur Plasmatechnolo
Brown Glenn W.
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