Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2007-11-06
2007-11-06
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
Reexamination Certificate
active
11013202
ABSTRACT:
A method according to one embodiment of the invention includes determining a map of a second part of a substrate belonging to a group of substrates. The method includes measuring a first part of at least one substrate belonging to the group to create an average profile map or average height map and computing a map of the second part of the substrate belonging to the group, based on the average profile map or the average height map. The computed map is stored for use during a later determination of a height or tilt of a substrate from the group.
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Boonman Marcus Emile Joannes
Brinkhof Ralph
De Nivelle Martin Jules Marie-Emile
Schoonewelle Hielke
Stoeten Jan
Akanbi Isiaka O
ASML Netherlands B.V.
Chowdhury Tarifur
Pillsbury Winthrop Shaw & Pittman LLP
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