Method for detection of oversized sub-resolution assist...

Details Method for detection of oversized sub-resolution assist... Method for detection of oversized sub-resolution assist...

2011-08-09

2011-08-09

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C382S144000, C356S628000, C356S635000, C356S636000, C356S239200, C356S239300, C356S237200

Reexamination Certificate

active

07995199

ABSTRACT:
Disclosed are methods and apparatus for inspecting a sub-resolution assist features (SRAF) on a reticle. A test flux measurement for a boundary area that encompasses a width and a length portion of a test SRAF is determined, and at least one reference flux measurement for one or more boundary areas of one or more reference SRAF's is determined. The test flux measurement is compared with the reference flux measurements. The comparison is used to then determine whether the test SRAF is undersized or oversized. If the test SRAF is determined to be oversized, it may then be determined whether the test SRAF is defective based on the comparison using a first threshold.

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WO patent application No. PCT/US2009/047357, Written Opinion mailed Jan. 12, 2010.

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