Method for detecting wafer orientation during transport

Details Method for detecting wafer orientation during transport Method for detecting wafer orientation during transport

1999-08-20

2000-03-21

Font, Frank G.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

118719, 356375, 414217, 414936, G01N 2186, C23C 1600, G01B 1114, B65G 2500, B65G 4907

Patent

active

060405856

ABSTRACT:
The orientation of a wafer carried on a blade of a semiconductor wafer transfer system is sensed in order to prevent wafer damage during transfer of the wafer from chamber-to-chamber within a semiconductor processing system. At least a pair of laser beams are used to sense both tilt of the wafer on the blade, and mis-alignment of the blade in the chamber. A control and logic circuit lock out movement of the blade when the laser beams indicate tilt of the wafer or mis-alignment of the blade.

REFERENCES:
patent: 5466945 (1995-11-01), Brickell et al.
patent: 5690744 (1997-11-01), Landau
patent: 5882165 (1999-03-01), Maydan et al.

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