Measuring and testing – Gas analysis – Detector detail
Patent
1995-06-23
1997-03-04
Williams, Hezron E.
Measuring and testing
Gas analysis
Detector detail
73 2328, 73 2901, 7333505, 422 83, 422 90, G01N 2712, G01N 3302, G01D 1800
Patent
active
056081561
ABSTRACT:
The disclosure where the hydrogen peroxide vapor 4a is supplied to a treatment vessel, and a subject 1 to be treated in the treatment vessel 2 is subjected to a sterilization treatment by contact with the hydrogen peroxide vapor 4a, the concentration of the hydrogen peroxide vapor 4a in the treatment vessel 2 is detected directly and accurately on a real-time basis by a semiconductor gas sensor 8.
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Ando Shinichi
Ichida Taizo
Taiyo Toyo Sanso Co., Ltd.
Wiggins J. David
Williams Hezron E.
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