Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-11-06
2009-11-17
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237100, C356S237400, C356S237500, C356S394000, C250S584000, C250S492200, C250S559010
Reexamination Certificate
active
07619729
ABSTRACT:
A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.
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Matsui Shigeru
Togashi Takahiro
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Nguyen Sang
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