Method for detecting particles and defects and inspection...

Details Method for detecting particles and defects and inspection... Method for detecting particles and defects and inspection...

2007-07-05

2008-11-25

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237500, C250S372000, C250S559460

Reexamination Certificate

active

07456948

ABSTRACT:
A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.

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