Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1988-10-25
1991-09-10
Rosenberger, Richard A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356237, 356430, 250572, G01N 2100
Patent
active
050468472
ABSTRACT:
A method and apparatus for detecting foreign matter on a sample by illuminating a stripe-shaped region with linearly polarized light. Some of the light reflected by the sample is intercepted by a light intercepting stage, and the rest of the light reflected by the sample, which passes through the light intercepting stage is directed to a detecting optical system, to be detected by a photo-detector. The sample is illuminated obliquely at a predetermined angle with respect to a group of straight lines constituting a primary pattern on the sample. The angle is selected so that the diffraction light reflected by the group of straight lines does not enter the detecting optical system. A polarizing spatial filter using a liquid crystal element may be disposed in a predetermined restricted region in a spacial frequency region, or Fourier transformation plane, within the detecting optical system. The light scattered by the sample may further be separated in the detecting optical system into partial beams having different wave orientation characteristics, which characteristics are detected by a number of one-dimensional solid state imaging elements. The signals are processed by a driver, adder, and quantizer in synchronism with the one-dimensional solid state imaging elements.
REFERENCES:
patent: 4376951 (1983-03-01), Miyazawa
patent: 4433235 (1984-02-01), Akiyama et al.
patent: 4610541 (1986-09-01), Tanimoto et al.
patent: 4614427 (1986-09-01), Koizumi et al.
patent: 4740079 (1988-04-01), Koizumi et al.
patent: 4814596 (1989-03-01), Koizumi et al.
Akiyama Nobuyuki
Koizumi Mitsuyoshi
Nakata Toshihiko
Oshima Yoshimasa
Yamuchi Yoshihiko
Hitachi , Ltd.
Pham Hoa
Rosenberger Richard A.
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