Method for detecting defects in semiconductor insulators

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324551, 324765, G01R 3126

Patent

active

055981020

ABSTRACT:
The reliability of thin film insulators is determined with noise measurements which find the barrier height mean and standard deviation. A constant voltage source is applied across the thin film insulator. A low noise amplifier is connected across a resistor which is in series with the insulator. A spectrum analyzer is connected to the low noise amplifier. The power density is obtained by observing the output of a spectrum analyzer. The current spectral density is compared to a predetermined reference to detect the presence of defects in the insulator.

REFERENCES:
patent: 4520448 (1985-05-01), Tremintin
patent: 5049811 (1991-09-01), Dreyer et al.
patent: 5057441 (1991-10-01), Gutt et al.
patent: 5420513 (1995-05-01), Kimura

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