Method for detecting defects in integrated-circuit arrays

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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371 225, G01R 3128

Patent

active

057867020

ABSTRACT:
A method for detecting defects between parallel rows of conductors (ROW) in an integrated-circuit array (ARR) includes (a) connecting all alternate rows (ROW) of conductors of the array (ARR) to a first voltage (V.sub.DD) and connecting the other alternate rows (ROW) of conductors of the array (ARR) to a second voltage (V.sub.REF) different from the first voltage, while measuring the current drawn; (b) if the current does not exceed a first limit, ending the process; (c) if the current exceeds the first limit, separately repeating step (a) on first and second halves of the array rather than all of the array, with all of the rows (ROW) of conductors of the half of the array (ARR) not under test connected to the second voltage (V.sub.REF); (d) if the current exceeds a second limit for a half of the array (ARR) in step (c), repeating step (a) on each quarter of the array (ARR) in that half with all of the rows (ROW) of the array (ARR) not under test connected to the second voltage V.sub.REF ; and (e) if the current exceeds a third limit for an array (ARR) quarter in step (d), continuing analogous steps for array (ARR) fractions divisible by two and for predetermined current limits until sufficient information concerning the defects is determined.

REFERENCES:
patent: 5285150 (1994-02-01), Henley et al.

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