Method for detecting abnormality in fluid supply line using...

Data processing: measuring – calibrating – or testing – Testing system – Of mechanical system

Reexamination Certificate

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C702S035000, C702S045000, C702S047000, C702S050000, C702S034000, C702S033000, C073S037000, C073S040000, C073S046000, C073S049700, C073S118040, C073S861420, C073S114410, C073S114430, C700S282000, C340S611000

Reexamination Certificate

active

07945414

ABSTRACT:
A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof, is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.

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International Search Report issued in corresponding International Application No. PCT/JP2006/317390, completed Sep. 13, 2006, mailed Sep. 26, 2006.
International Preliminary Report on Patentability of corresponding International Application No. PCT/JP2006/317309, issued Mar. 4, 2008 and its english translation.
Written Opinion of the International Searching Authority of corresponding International Application No. PCT/JP2006/317390 and its english translation, Apr. 2005.

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