Data processing: measuring – calibrating – or testing – Testing system – Of mechanical system
Reexamination Certificate
2011-05-17
2011-05-17
Tsai, Carol S (Department: 2857)
Data processing: measuring, calibrating, or testing
Testing system
Of mechanical system
C702S035000, C702S045000, C702S047000, C702S050000, C702S034000, C702S033000, C073S037000, C073S040000, C073S046000, C073S049700, C073S118040, C073S861420, C073S114410, C073S114430, C700S282000, C340S611000
Reexamination Certificate
active
07945414
ABSTRACT:
A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof, is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.
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Dohi Ryousuke
Hirata Kaoru
Ikeda Nobukazu
Matsumoto Atsushi
Nagase Masaaki
Fujikin Incorporated
Griffin & Szipl, P.C.
Tsai Carol S
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