Plastic and nonmetallic article shaping or treating: processes – With measuring – testing – or inspecting
Reexamination Certificate
2007-04-19
2010-12-21
Wyrozebski, Kat (Department: 1791)
Plastic and nonmetallic article shaping or treating: processes
With measuring, testing, or inspecting
Reexamination Certificate
active
07854867
ABSTRACT:
A method for detecting a particle between a nanoimprint mold assembly and a substrate in a nanoimprint lithography system.
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Grun Robert J
Molecular Imprints, Inc.
Robinson Laura C.
Wyrozebski Kat
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