Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1985-05-06
1987-05-12
Pianalto, Bernard D.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
55 2, 55 12, 118723, 250281, 250283, B05D 306
Patent
active
046649387
ABSTRACT:
An apparatus and method are provided for depositing silicon on a substrate in a deposition chamber wherein deposition of impurities can be effectively prevented. Impurities are ionized according to the invention to form impurity ions which are collected so as to prevent their deposition on the substrate.
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Phillips Petroleum Company
Pianalto Bernard D.
Sharp William R.
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