Semiconductor device manufacturing: process – Having organic semiconductive component
Patent
1997-11-24
1999-09-14
Bowers, Charles
Semiconductor device manufacturing: process
Having organic semiconductive component
438 22, 438 35, 257 40, 257 79, 257 89, H01L 5140
Patent
active
059535873
ABSTRACT:
A patterning system with a photoresist overhang allows material to be deposited onto a substrate in various positions by varying the angle from which the material is deposited, and by rotating the substrate. The patterning system can be used to fabricate a stack of organic light emitting devices on a substrate using the same patterning system and without removing the substrate from vacuum.
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Bulovic Vladimir
Burrows Paul
Forrest Stephen R.
Bowers Charles
Christianson Keith
The Trustees of Princeton University
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