Coating processes – Electrical product produced – Metallic compound coating
Patent
1996-06-24
1998-06-30
King, Roy V.
Coating processes
Electrical product produced
Metallic compound coating
427566, 4271262, 427405, 4274192, C23C 1424, B05D 306
Patent
active
057730784
ABSTRACT:
An improved method for depositing zirconium oxide from a zirconium oxide source onto a substrate by means of physical vapor deposition is described. The method includes the step of adding zirconium metal to the zirconium oxide source, which is usually in the form of a cylindrical ingot. The zirconium metal is present in an amount sufficient to chemically bond with a substantial portion of oxygen which would otherwise be freed from the oxide source, as both the zirconium metal and the zirconium oxide source are evaporated during physical vapor deposition. The invention is especially suited for EB-PVD techniques, in which an electron beam is used to evaporate the zirconium metal and the zirconium oxide source during physical vapor deposition. In one embodiment, the zirconium metal comprises a tube which surrounds and contacts at least a portion of the outer surface of the ingot. In another embodiment, the zirconium metal is in the form of a rod inserted in a cavity within the ingot.
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General Electric Company
Johnson Noreen C.
King Roy V.
Stoner Douglas E.
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