Method for depositing ultrathin laminated oxide coatings

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...

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427249, 4272552, 4272553, 4272557, 4274192, 4274197, C23C 1640

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048449512

ABSTRACT:
A method for depositing a wear resistant composite ceramic coating on a cemented carbide or hard ceramic substrate. A gas mixture is passed over the substrate, including a halide vapor of Al, Zr, or Y and one or more oxidizing gases at about 900.degree.-1250.degree. C. for the cemented carbide or about 900.degree.-1500.degree. C. for the ceramic and between about 1 torr and about ambient pressure. During the deposition of the oxide, a different halide of Al, Zr, or Y is pulsed into the gas mixture. The parameters are controlled to deposit a fully dense, adherent, wear resistant, laminated oxide coating about 0.3-20 microns thick on the substrate having at least three layers each about 0.1-3 microns thick and each predominantly of a different material than that of the adjacent layers. Optionally, the process may be controlled to produce at least one layer in which discrete particles of the material predominantly in an adjacent layer are present in a matrix of the predominant material of the layer.

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