Method for depositing thin, transparent metal oxide films

Details Method for depositing thin, transparent metal oxide films Method for depositing thin, transparent metal oxide films

1984-09-24

1986-02-18

Hoffman, James R.

Coating processes

Electrical product produced

Transparent base

427160, 427164, 427166, C03C 17245, B05D 512, B05D 506

Patent

active

045713502

ABSTRACT:
This invention is directed to a method for producing thin, transparent metal oxide films of very uniform thickness through the pyrolysis of a metal salt which comprises spraying an atomized mist of the metal salt into a fuming chamber operating at a sufficiently high temperature to vaporize the mist and then drawing the fumes out of said chamber into contact with the surface of a substrate which is at a temperature essentially equivalent to that of the fumes at the exit end of said chamber, that temperature being sufficiently high to thermally decompose said metal salt and deposit a film of metal oxide on the substrate.

REFERENCES:
patent: 3331702 (1967-07-01), Dates et al.
patent: 4123244 (1978-10-01), Leclercq et al.
patent: 4125391 (1978-11-01), Van Laethem
patent: 4293594 (1981-10-01), Yoldas et al.

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