Method for depositing pure metal halide compositions

Details Method for depositing pure metal halide compositions Method for depositing pure metal halide compositions

1985-05-13

1994-01-11

Miller, Edward A.

Chemistry of inorganic compounds

Halogen or compound thereof

Binary compound containing metal

65 312, 65 182, 65DIG16, 423263, 423489, 423490, 423492, 423493, 423495, 423496, 423497, 423498, C01B 900

Patent

active

052778894

ABSTRACT:
Metal halide compositions of enhanced purity are produced by vapor phase deposition via reactions involving organometallic starting materials in a process wherein a carbon getter is provided in the reaction zone and/or adjacent the developing metal halide deposit. The carbon getter reduces carbon contamination in the product which can result from side decomposition reactions involving the organometallic starting materials.

REFERENCES:
patent: 4065280 (1977-12-01), Kao et al.
patent: 4378987 (1983-04-01), Miller et al.
patent: 4501602 (1985-02-01), Miller et al.
patent: 4610708 (1986-09-01), Sarhangi et al.
patent: 4627865 (1986-12-01), Roba
patent: 4718929 (1988-01-01), Power et al.
Guralnik "Webster's New World Dictionary of the American Language", 2nd Col. Ed., p. 588, World Publ. Co. (1970) New York.

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