Method for depositing nitride-based composite coatings by CVD

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

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427249, 427255, 4272553, 4272557, 4274192, 4274197, C23C 1634, C23C 1636

Patent

active

049434500

ABSTRACT:
A co-deposition process for producing a wear resistant article, such as a cutting tool. Gaseous halides of two or more of Si, B, Al, Y, Ti, Zr, Hf, V, Nb, Ta, Mo, and W, with other reactants including a volatile nitrogen source, for example N.sub.2 or NH.sub.3, are passed over a hard refractory at a temperature above about 800.degree. C., and 1 torr to about ambient pressure to form a composite refactory coating layer on the substrate. The coating is a continuous first-phase nitride matrix having particles of at least one different nitride dispersed therein. Oxynitrides may be produced by including a volatile oxygen source, for example NO or NO.sub.2, in the gas mixture.

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