Stock material or miscellaneous articles – Composite – Of inorganic material
Patent
1986-04-11
1989-05-09
Childs, Sadie L.
Stock material or miscellaneous articles
Composite
Of inorganic material
427255, 4272552, 428697, 428938, 437225, B32B 900, C23C 1630
Patent
active
048289388
ABSTRACT:
A method for chemical vapor deposition of materials containing tellurium, such as cadmium telluride and mercury cadmium telluride, wherein the reactant source of the tellurium is a tellurophene or methyltellurol. These reactant sources have high vapor pressures, and the reactant source vapors emitted from the reactant sources have decomposition temperatures of less than about 300.degree. C., so that deposition may be accomplished at low temperatures of about 250.degree. C. The reactant source vapor containing tellurium is mixed with a reactant source vapor containing another substance to be codeposited, such as dimethylcadmium or dimethylmercury, and contacted with a substrate maintained at the deposition temperature, the deposition being preferably accomplished in an inverted vertical chemical vapor deposition reactor.
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Lichtmann Lawrence S.
Parsons James D.
Childs Sadie L.
Denson-Low Wanda K.
Hughes Aircraft Company
Karambelas A. W.
Laslo V. G.
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