Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1975-04-24
1978-08-15
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
204164, 427 42, 427 40, 427 54, B05D 306
Patent
active
041073509
ABSTRACT:
Method and apparatus for use of emitting, ionizing, accelerating and collecting elements in a high vacuum to implant a hard film on a plastic substrate or the like. In preparation, a slug of a selected material to be deposited as a film is placed in the emitter. The specimens or articles to be implanted are placed on supports in the vicinity of the collector. A cover enclosure is then placed in position and the region enclosed by the cover is exhausted to a high vacuum. Selected potentials are applied to various elements of the apparatus and an accelerating/directing field, which may be developed electrostatically, magnetically or by a combination of both, is developed in the acceleration structure. The electrostatic field causes electron emission from the ionizing elements to develop an increased charge on the emitted ionized particles. When implantation is to begin, a shutter control is moved out of beam blocking position and ionized particles from the emitter pick up additional charge from the ionizing elements and are accelerated to high velocity for bombarding the specimens. The collector is provided near the end of the enclosure beyond the specimen support region. The specimens are discharged regularly to eliminate the build-up of surface charge from the stream of bombarding ions.
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Berg Joseph E.
Brown, Jr. Randolph E.
Bissell Henry M.
Newsome John H.
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