Fishing – trapping – and vermin destroying
Patent
1990-07-19
1992-06-09
Hearn, Brian E.
Fishing, trapping, and vermin destroying
148DIG18, 427 99, 427255, 437228, H01L 2102
Patent
active
051206803
ABSTRACT:
Disclosed is a method for forming a silicon dioxide layer on a substrate by radio-frequency deposition from a plasma comprising oxygen, argon, and tetraethyl orthosilicate (TEOS) or tetramethyl cyclotetrasiloxane (TMCTS). A negative bias is imparted to the substrate. The resulting ion bombardment induces surface migration. Because TEOS and TMCTS have a relatively high mean free path for surface migration, the filling of soft spots and key holes is promoted.
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Foo Pang-Dow
Huo Tai-Chan D.
Yan Man F.
AT&T Bell Laboratories
Finston M. I.
Hearn Brian E.
Holtzman Laura M.
Pacher E. E.
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