Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Producing josephson junction – per se
Patent
1994-04-14
1995-08-01
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Producing josephson junction, per se
505238, 505473, 505702, 505701, 117108, 427 62, 4274192, 4274193, H01L 3924
Patent
active
054380375
ABSTRACT:
A method for depositing a thin film of a material on an oxide thin film having a perovskite type crystal structure formed on a substrate comprising steps of depositing a seed layer of a single crystal of the material having an extremely thin thickness at a relatively high substrate temperature on the oxide thin film having a perovskite type crystal structure and depositing a thin film of the material on the seed layer at a lower substrate temperature.
REFERENCES:
patent: 5061687 (1991-10-01), Takada
Walkenhorst, et al. Appl. Phys. Lett., "Dielectric properties of SrTiO.sub.3 thin films used in high T.sub.c superconducting . . . ", 1992, 60(14):1744-1746.
King Roy V.
Sumitomo Electric Industries Ltd.
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