Method for depositing aluminum oxide coatings on flat glass

Details Method for depositing aluminum oxide coatings on flat glass Method for depositing aluminum oxide coatings on flat glass

2007-01-09

2007-01-09

Chen, Bret (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

C427S255340, C427S255390, C427S255700

Reexamination Certificate

active

10797426

ABSTRACT:
A chemical vapor deposition process for laying down an aluminum oxide coating on a glass substrate through the use of an organic ester having a β hydrogen on the alkyl group bonded to the carboxylate oxygen and an inorganic aluminum halide. The resulting article has an aluminum oxide coating which can be of substantial thickness because of the high deposition rates attainable with the novel process. Preferably, the coating deposition rates resulting from the method of the present invention may be greater than or equal to 200 Å per second.

REFERENCES:
patent: 2805965 (1957-09-01), Robinson
patent: 3639458 (1972-02-01), Etherington et al.
patent: 3847643 (1974-11-01), Hammer et al.
patent: 4129434 (1978-12-01), Plumat et al.
patent: 4160061 (1979-07-01), Okino et al.
patent: 4180400 (1979-12-01), Smith et al.
patent: 4308316 (1981-12-01), Gordon
patent: 4321073 (1982-03-01), Blair
patent: 4675089 (1987-06-01), Lory et al.
patent: 4842775 (1989-06-01), Okada et al.
patent: 4946712 (1990-08-01), Goodman et al.
patent: 5132196 (1992-07-01), Hirayama et al.
patent: 5217753 (1993-06-01), Goodman et al.
patent: 5244692 (1993-09-01), Zagdoun et al.
patent: 5256485 (1993-10-01), Terneu et al.
patent: 5374570 (1994-12-01), Nasu et al.
patent: 5540777 (1996-07-01), Barbee et al.
patent: 5648113 (1997-07-01), Barbee et al.
patent: 5665608 (1997-09-01), Chapple-Sokol et al.
patent: 5728222 (1998-03-01), Barbee et al.
patent: 5776603 (1998-07-01), Zagdoun et al.
patent: 5922405 (1999-07-01), Kim et al.
patent: 5980983 (1999-11-01), Gordon
patent: 6037003 (2000-03-01), Gordon et al.
patent: 6309427 (2001-10-01), Korte
patent: 6362414 (2002-03-01), Fujisawa et al.
patent: 6426307 (2002-07-01), Lim
patent: 6495709 (2002-12-01), Celinska et al.
patent: 6664186 (2003-12-01), Callegari et al.
patent: 6838179 (2005-01-01), Legrand
patent: 2001/0006835 (2001-07-01), Kim et al.
patent: 2002/0001969 (2002-01-01), Jang et al.
patent: 2002/0106451 (2002-08-01), Skarp et al.
patent: 2003/0039843 (2003-02-01), Johnson et al.
patent: 2005/0202170 (2005-09-01), Remington et al.
patent: 0 460 254 (1991-12-01), None
patent: 0 997 551 (1996-05-01), None
patent: 0 994 080 (2000-04-01), None
patent: 0 712 815 (2000-05-01), None
patent: 835820 (1960-05-01), None
patent: WO 97/20963 (1997-06-01), None
patent: WO 98/16667 (1998-04-01), None
patent: 01/05723 (2001-01-01), None
Silvestri, et al., Properties of Al2O3Films Deposited from the AlCl3, CO2, and H2System, J. Electrochem. Soc.: - Solid-State Science and Technology, Jun. 1978, vol. 125, pp. 902-907.
Park, et al., The effects of reaction parameters on the deposition characteristics in Al2O3CVD, J. Vac. Sci. Technol. A, vol. 1, No. 4, Oct.-Dec. 1983, pp. 1820-1824.
Chemical Vapour Deposition of Aluminium Oxides from Various Gas Mixtures, Journal of Vapor Deposition, vol. 1 - Apr. 1993, (pp. 333-417).

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