Method for depositing a polymer layer on a surface of a...

Coating processes – Centrifugal force utilized

Reexamination Certificate

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C427S355000, C427S359000, C427S425000, C438S758000

Reexamination Certificate

active

08067060

ABSTRACT:
A polymer layer is deposited on a surface of a support, said surface comprising a flat main part and at least one recessed zone with respect to the flat main part. The polymer layer is achieved by at least the following successive steps:deposition of a predetermined quantity of a liquid mixture comprising at least a polymer or at least a precursor of said polymer on the flat main part of the surface of the support,introducing at least a part of the liquid mixture into the recessed zone by moving a cylinder placed on the flat main part of the surface,deposition of an additional quantity of liquid mixture on the flat main part of the surface,and rotation of the support along an axis perpendicular to the plane of the surface.

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patent: A 2005-019560 (2005-01-01), None
Fischer, K. et al., “Spray Coating—a Solution for Resist Film Deposition Across Severe Topography,” IEEE/SEMI Int'l Electronics Manufacturing Technology Symposium, SUSS MicroTec AG, XP010715512, p. 338-342 (Jul. 2004).
Pham, Nga P. et al., “Direct Spray Coating of Photoresist—a New Method for Patterning 3-D Structures,” Eurosensors XVI, The 16thEuropean Conference on Solid-State Transducers, p. 182-185 (Sep. 15-18, 2002).

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