Method for depositing a layer on the inside of cavities of a wor

Details Method for depositing a layer on the inside of cavities of a wor Method for depositing a layer on the inside of cavities of a wor

1979-08-29

1981-10-13

Silverberg, Sam

Coating processes

Interior of hollow article coating

Coating by vapor, gas, mist, or smoke

118715, 118721, 4272481, C23C 1100

Patent

active

042948711

ABSTRACT:
Disclosed herein is a process for the chemical deposition of a material layer on the inside of cavities of a work piece by conducting a gas stream in a substantially laminar flow along a heated work piece wherein deposition occurs from the gaseous phase, at a pressure of less than 10.sup.4 Pascal (N/m.sup.2).

REFERENCES:
patent: 2671739 (1954-03-01), Lander
patent: 3291631 (1966-12-01), Smith
patent: 3338209 (1967-08-01), Bholg
patent: 3805736 (1974-04-01), Foehring

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