Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1987-09-03
1989-10-17
Childs, Sadie
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
427255, 4272552, C23C 1632
Patent
active
048746428
ABSTRACT:
A method for producing the disclosed material comprises introducing into a chemical vapor deposition (CVD) reactor a mixture of process gases comprised essentially of (1) tungsten hexafluoride, (2) a volatile oxygen- and hydrogen-containing organic compound, and (3) hydrogen; controlling the ratio of the tungsten hexafluoride to the oxygen- and hydrogen-containing organic compound within the CVD reactor so that the W/C atomic ratio is within the range of about 0.5 to about 15; controlling the reaction temperature so it is within the range of above about 300.degree. to less than about 650.degree. C.; controlling the total pressure within the range of about 1 Torr. to about 1,000 Torr.; and controlling the ratio of H.sub.2 to WF.sub.6 within the range of about 4 to about 20; to produce W and W.sub.2 C, W and W.sub.3 C, or W and W.sub.2 C and W.sub.3 C.
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Ceccarelli Christopher
Dyer Paul N.
Garg Diwaker
Kidd Richard W.
Klucher Beth A.
Air Products and Chemicals Inc.
Childs Sadie
Dannells, Jr. Richard A.
Marsh, Jr. William F.
Simmons James C.
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