Method for delivering an involatile reagent in vapor form to a C

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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505734, 505730, 427 62, 4272553, 4272552, 4272551, 4271263, 4274191, 4274192, 118726, C23C 1600, B05D 512

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active

052043142

ABSTRACT:
A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated temperature. A carrier gas may be flowed past the flash vaporization matrix structure to yield a carrier gas mixture containing the flash vaporized source reagent. The matrix structure preferably has a high surface-to-volume ratio, and may suitably com

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