Method for deep level transient spectroscopy scanning and appara

Details Method for deep level transient spectroscopy scanning and appara Method for deep level transient spectroscopy scanning and appara

1981-06-03

1984-03-13

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 60C, G01R 3126

Patent

active

044370601

ABSTRACT:
A Deep Level Transient Spectroscopy (DLTS) method in which a high frequency measuring signal is applied continuously on a semiconductor junction, and exciting pulses are generated which are coupled through fast semiconductor switching elements to the junction to alternatively bias the junction in reverse and forward (or slightly reverse) directions. The high frequency measuring signal passed through the junction is evaluated by means of a lock-in amplifier phase-locked with a constant phase angle, independent of the repetition rate of the exciting pulses.
The evaluation circuits of the apparatus including the lock-in amplifier are controlled by switching elements driven by control signals generated from the exciting pulses.

REFERENCES:
patent: 3859595 (1975-01-01), Lang
Miller et al.; "Transient Capacitance . . . "; Rev. of Sci. Instrum.; vol. 48; No. 3; Mar. 1977; pp. 237-239.
Ambrozy et al.; "Measuring Instruments . . . "; Periodica Polytechnica; Elect. Eng.; vol. 14; No. 3; pp. 301-310.
Nagasawa et al.; "Fast Transient . . . "; Appl. Phys.; vol. 8; No. 1; Sep. 1975; pp. 35-42.
Ambrozy, A.; "A Simple . . . "; Solid-State Electronics; vol. 13; 1970; pp. 347-353.
Rozhkov et al.; "Measurement of the Volt-Capacitance . . . "; Inst. and Epx. Tech.; vol. 14; No. 6; Nov./Dec. 1971; pp. 1729-1730.
Borsuk et al.; "Current Transient . . . "; IEEE Trans. on Electron Devices; vol. ED-27; No. 12; Dec. 1980; pp. 2217-2225.

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