Data processing: generic control systems or specific application – Generic control system – apparatus or process – Sequential or selective
Reexamination Certificate
2004-05-27
2008-10-14
Holmes, Michael B. (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Sequential or selective
C700S079000, C700S080000
Reexamination Certificate
active
07437199
ABSTRACT:
A method of using an APC system to perform a data pre-population function is described in which the APC system is coupled to a processing element. The APC system comprises an APC computer including operational software, a database coupled to the APC computer, and a GUI, and the processing element comprises at least one of a tool, a processing module, and a sensor. When the APC system operates, the APC system collects data from the processing element and stores the collected data in the database. When an APC malfunction occurs, a data recovery (data pre-population) can be performed. When some of the historical data is missing, a data recovery (data pre-population) can be performed. When an APC system is coupled to a new tool having some historical data, a data recovery (data pre-population) can be performed.
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Harada Satoshi
Hume, III Edward C
Klekotka James E
Willis James E
Holmes Michael B.
Tokyo Electron Limited
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