Method for CVD surface coating and CVD reactor system

Details Method for CVD surface coating and CVD reactor system Method for CVD surface coating and CVD reactor system

1998-10-05

2000-04-04

Bueker, Richard

Coating apparatus

Intercontrol or safety interlock

118715, 118733, 137375, 13762546, C23C 1600

Patent

active

060456175

ABSTRACT:
Disclosed herein is a method and a reactor system for CVD surface coating. In this method, the reaction gas is supplied to the reactor chamber with any frequency and at any time intervals in succession, rising and falling in the form of a pulsed gas stream. The reversal of the gas flow direction is performed by a multipath valve located inside the reactor which can be controlled from outside by means of an adjusting shaft.

REFERENCES:
patent: 4614205 (1986-09-01), Oroskar
patent: 5277144 (1994-01-01), Moody
patent: 5441570 (1995-08-01), Hwang
patent: 5503875 (1996-04-01), Imai

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