Etching a substrate: processes – Forming or treating electrical conductor article
Reexamination Certificate
2006-04-11
2006-04-11
Chea, Thorl (Department: 1752)
Etching a substrate: processes
Forming or treating electrical conductor article
C216S016000, C216S019000, C216S049000, C445S049000, C445S050000
Reexamination Certificate
active
07025892
ABSTRACT:
A method is provided for creating gated filament structures for a field emission display. A multi-layer structure is provided that includes a substrate, an insulating layer and a metal gate layer positioned on at least a portion of a top surface of the insulating layer. A plurality of patterned gates are also provided in order to define a plurality of gate apertures on the top surface of the insulating layer. A plurality of spacers are formed in the gate apertures at edges of the patterned gates on the top surface of the insulating layer. The spacers are used as masks for etching the insulating layer and forming a plurality of pores in the insulating layer. The pores are plated with a filament material that extends from the insulating pores, into the gate apertures, and creates a plurality of filaments. The spacers are then removed. The multi-layer structure can further include a conductivity layer on at least a portion of a top surface of the substrate.
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Barton Roger W.
Bergeron David L.
Macaulay John M.
Morse Jeffrey D.
Candescent Technologies Corporation
Chea Thorl
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