Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1988-02-03
1989-09-19
Pianalto, Bernard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 49, 427163, 427166, 427167, 427294, 4272552, 4272553, 4272555, 4272557, 427404, 4274193, B05D 306
Patent
active
048680044
ABSTRACT:
In a method for creating a corrosion-resistant coating (27) of high reflectivity on the surface of a workpiece (22), especially a glass reflector insert, in an evacuable coating chamber with a vaporizing system disposed therein, a second coating (24) of aluminum is deposited cold from a vapor onto a first, cold-applied coating (23) forming an adhesion mediator of nickel-chromium oxide, and onto that a third coating (25) of SiO.sub.2 is applied cold, and a fourth coating (26) of TiO.sub.2 or Ta.sub.2 O.sub.5 is applied at a workpiece temperature of at least 250.degree. C., and finally, as a fifth coating (27), a nickel-chromium oxide layer is deposited reactively from a vapor at a workpiece temperature of at least 250.degree. C. The deposit of the first, third, fourth and fifth coatings (23, 25, 26, 27) from a vapor is performed by means of electron beam vaporizers and the vapor depositing of the second coating (24) is performed by means of a resistance vaporizer.
Grunewald Andreas
Zultzke Walter
Leybold-Aktiengesellschaft
Pianalto Bernard
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