Method for correcting structure-size-dependent positioning...

Details Method for correcting structure-size-dependent positioning... Method for correcting structure-size-dependent positioning...

2007-07-31

2007-07-31

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

Reexamination Certificate

active

11190056

ABSTRACT:
A method for correcting structure-size-dependent positioning errors during the photolithographic projection by an exposure apparatus and the use thereof includes providing an exposure apparatus for exposing a plurality of exposure fields and a simulation model of the exposure apparatus for specifying correction values for intra-field errors, providing a first pattern with first structure elements and first measurement marks, which, in the case of a projection, are beset by a first positioning error and a second positioning error dependent on the dimensions and the position in the exposure field, providing a correction function suitable for specifying the first and the second positioning error, determining an average relative positioning error including the first and the second positioning error, calculating correction values for the control of the exposure apparatus, and transmitting the correction values to the exposure apparatus so that subsequent exposures are performed with an improved overlay.

REFERENCES:
patent: 2002/0183989 (2002-12-01), Chien et al.
patent: 2003/0202174 (2003-10-01), Smith et al.
patent: 2003/0223630 (2003-12-01), Adel et al.

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