Method for controlling the switching speed of bipolar power devi

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357 16, 357 4, 357 60, 357 64, 357 29, 357 88, H01L 2972

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active

050973088

ABSTRACT:
The switching speed of bipolar power rectifiers is increased by formation of misfit dislocations in the depletion region, spaced from the substrate/epitaxial layer interface, in order to reduce minority carrier lifetime. The misfit dislocations are formed by the introduction of germanium during epitaxy, and are distributed along the silicon/silicon-germanium interface. Preferably, the germanium containing layer is located proximate the center of the depletion region.

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