Method for controlling the conductivity of polyimide films and i

Details Method for controlling the conductivity of polyimide films and i Method for controlling the conductivity of polyimide films and i

1982-03-12

1983-07-12

Hoffman, James R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 40, 427 41, B05D 306, B05D 512

Patent

active

043930921

ABSTRACT:
When ion bombardment milling is used to each electronic devices having metal-polymer sandwich stuctures, the ion bombardment induces conductivity in the normally insulating polymer layers, even at low (e.g. 100 eV) bombardment energies. Bombarded polymer layers can be used to produce thin film resistors. Where it is desired to reduce or eliminate the bombardment induced conductivity, this may be accomplished, for a polyimide polymer, by a brief (e.g. 30 sec) exposure to a low energy (e.g.<10 eV) plasma, or by heating for a longer period of time (e.g 2 hours at 250.degree. C.), or by a combination thereof. It is desirable that the plasma contain oxygen.

REFERENCES:
patent: 4199650 (1980-04-01), Mirtich et al.

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