Method for controlling stage apparatus

Details Method for controlling stage apparatus Method for controlling stage apparatus

2006-08-04

2008-10-14

Ip, Paul (Department: 2837)

Electricity: motive power systems

Linear-movement motors

C318S560000, C318S562000, C318S649000

Reexamination Certificate

active

07436135

ABSTRACT:
At least one exemplary embodiment is directed to a control method for controlling a stage apparatus including a base and a stage, the base including first and second coil phases, the stage including a plurality of magnets. The control method includes a first energization step of rotating the stage to a stable angle by contemporaneously energizing a plurality of coils comprising the first coil phase and a second energization step of rotating the stage to a stable angle by sequentially energizing coils comprising the second coil phase one by one.

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patent: 2006/0202568 (2006-09-01), Korenaga
patent: 2004-254489 (2004-09-01), None

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